Paper Title:
Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
365-370
DOI
10.4028/www.scientific.net/SSP.57-58.365
Citation
A. Armigliato, R. Balboni, S. Frabboni, A. Tixier, G.P. Carnevale, P. Colpani, A. Marmiroli, "Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements", Solid State Phenomena, Vols. 57-58, pp. 365-370, 1997
Online since
July 1997
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Price
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