CZ Crystal Growth Development in Super Silicon Crystal Project |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
37-42 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.37 |
| Citation |
H. Yamagishi et al., 1997, Solid State Phenomena, 57-58, 37 |
| Authors |
H. Yamagishi, M. Kuramoto, Y. Shiraishi, M. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, Kazuya Takada |
| Keywords |
Large-Diameter, Silicon, Single Crystal Growth, Super Silicon |
| Full Paper |
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