Paper Title:
Defects Produced in Silicon by Reactive Ion Etching
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
371-376
DOI
10.4028/www.scientific.net/SSP.57-58.371
Citation
H.B. Erzgräber, H.H. Richter, M.-A. Aminpur, A. Wolff, K. Blum, "Defects Produced in Silicon by Reactive Ion Etching", Solid State Phenomena, Vols. 57-58, pp. 371-376, 1997
Online since
July 1997
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Price
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