Paper Title:
Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers
| Periodical |
Solid State Phenomena (Volumes 57 - 58)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology VII
|
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
387-392 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.387 |
| Citation |
M.-A. Trauwaert et al., 1997, Solid State Phenomena, 57-58, 387 |
| Authors |
M.-A. Trauwaert, Jan Vanhellemont, U. Lambert, D. Gräf, Karine Kenis, Paul W. Mertens, Marc M. Heyns |
| Keywords |
Anneal, Contrast Microscopy, Grown-in Defects, Interference, Silicon |
| Price |
US$ 28,- |