Paper Title:

Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers

Periodical Solid State Phenomena (Volumes 57 - 58)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VII
Edited by C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages 387-392
DOI 10.4028/www.scientific.net/SSP.57-58.387
Citation M.-A. Trauwaert et al., 1997, Solid State Phenomena, 57-58, 387
Authors M.-A. Trauwaert, Jan Vanhellemont, U. Lambert, D. Gräf, Karine Kenis, Paul W. Mertens, Marc M. Heyns
Keywords Anneal, Contrast Microscopy, Grown-in Defects, Interference, Silicon
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