Paper Title:
Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
387-392
DOI
10.4028/www.scientific.net/SSP.57-58.387
Citation
M.-A. Trauwaert, J. Vanhellemont, U. Lambert, D. Gräf, K. Kenis, P. W. Mertens, M. M. Heyns, "Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers", Solid State Phenomena, Vols. 57-58, pp. 387-392, 1997
Online since
July 1997
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Price
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