Effect of Stress Induced Defects on Electrical Properties of Czochralski Grown Silicon |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
393-400 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.393 |
| Citation |
Andrzej Misiuk et al., 1997, Solid State Phenomena, 57-58, 393 |
| Authors |
Andrzej Misiuk, W. Jung, Barbara Surma, J. Jun, M. Rozental |
| Keywords |
Annealing, CZ-Si, Hydrostatic Pressure, Oxygen, Thermal Donor |
| Full Paper |
Get the full paper by clicking here
|
