Paper Title:
Effect of Stress Induced Defects on Electrical Properties of Czochralski Grown Silicon
| Periodical | Solid State Phenomena (Volumes 57 - 58) |
|---|---|
| Main Theme | Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by | C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages | 393-400 |
| DOI | 10.4028/www.scientific.net/SSP.57-58.393 |
| Citation | Andrzej Misiuk et al., 1997, Solid State Phenomena, 57-58, 393 |
| Authors | Andrzej Misiuk, W. Jung, Barbara Surma, J. Jun, M. Rozental |
| Keywords | Annealing, CZ-Si, Hydrostatic Pressure, Oxygen, Thermal Donor |
| Price | US$ 28,- |
View full size
