Paper Title:
Gettering by Voids in Silicon: A Comparison with other Techniques
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
43-52
DOI
10.4028/www.scientific.net/SSP.57-58.43
Citation
V. Raineri, "Gettering by Voids in Silicon: A Comparison with other Techniques", Solid State Phenomena, Vols. 57-58, pp. 43-52, 1997
Online since
July 1997
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Price
$32.00
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