Gettering by Voids in Silicon: A Comparison with other Techniques |
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| Journal | Solid State Phenomena (Volumes 57 - 58) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by | C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages | 43-52 |
| DOI | 10.4028/www.scientific.net/SSP.57-58.43 |
| Citation | Vito Raineri, 1997, Solid State Phenomena, 57-58, 43 |
| Authors | Vito Raineri |
| Keywords | Gettering, Metal Impurity, Silicon, Void |
| Full Paper | 
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