Gettering in Advanced Low Temperature Processes |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
53-62 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.53 |
| Citation |
S. Sadamitsu et al., 1997, Solid State Phenomena, 57-58, 53 |
| Authors |
S. Sadamitsu, S. Ogushi, Y. Koike, N. Reilly, T. Nagashima, Mizuka Sano, H. Tsuya |
| Keywords |
Epitaxial Wafers, Gettering, Low Temperature Process, Metal Impurity, Silicon |
| Full Paper |
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