Paper Title:
Gettering in Advanced Low Temperature Processes
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
53-62
DOI
10.4028/www.scientific.net/SSP.57-58.53
Citation
S. Sadamitsu, S. Ogushi, Y. Koike, N. Reilly, T. Nagashima, M. Sano, H. Tsuya, "Gettering in Advanced Low Temperature Processes", Solid State Phenomena, Vols. 57-58, pp. 53-62, 1997
Online since
July 1997
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Price
$32.00
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