Metal Gettering by Defective Regions in Carbon-Implanted Silicon |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
63-68 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.63 |
| Citation |
Reinhard Kögler et al., 1997, Solid State Phenomena, 57-58, 63 |
| Authors |
Reinhard Kögler, J.R. Kaschny, R.A. Yankov, P. Werner, A.B. Danilin, Wolfgang Skorupa |
| Keywords |
Defect, Gettering, Ion-Implantation, Metal, Silicon |
| Full Paper |
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