Paper Title:
Metal Gettering by Defective Regions in Carbon-Implanted Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
63-68
DOI
10.4028/www.scientific.net/SSP.57-58.63
Citation
R. Kögler, J.R. Kaschny, R.A. Yankov, P. Werner, A.B. Danilin, W. Skorupa, "Metal Gettering by Defective Regions in Carbon-Implanted Silicon", Solid State Phenomena, Vols. 57-58, pp. 63-68, 1997
Online since
July 1997
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Price
$32.00
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