Metallic Impurity Gettering in MeV Implanted Si |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
69-74 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.69 |
| Authors |
O.V. Kononchuk,
R.A. Brown,
Sergei V. Koveshnikov,
K.L. Beaman,
F. Gonzalez,
George A. Rozgonyi
|
| Keywords |
Gettering, Metallic Impurity, MeV Ion Implantation, Silicon, SIMS |
| Full Paper |
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