Paper Title:
Metallic Impurity Gettering in MeV Implanted Si
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
69-74
DOI
10.4028/www.scientific.net/SSP.57-58.69
Citation
O.V. Kononchuk, R.A. Brown, S. V. Koveshnikov, K.L. Beaman, F. Gonzalez, G. A. Rozgonyi, "Metallic Impurity Gettering in MeV Implanted Si", Solid State Phenomena, Vols. 57-58, pp. 69-74, 1997
Online since
July 1997
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Price
$32.00
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