Paper Title:
Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
75-80
DOI
10.4028/www.scientific.net/SSP.57-58.75
Citation
H. Takahashi, H. Yamada-Kaneta, M. Suezawa, "Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon", Solid State Phenomena, Vols. 57-58, pp. 75-80, 1997
Online since
July 1997
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Price
$32.00
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