Silicon Wafer Technology: The Challenges towards the Gigabit Era |
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| Journal | Solid State Phenomena (Volumes 57 - 58) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by | C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages | 9-18 |
| DOI | 10.4028/www.scientific.net/SSP.57-58.9 |
| Citation | A.P. Mozer, 1997, Solid State Phenomena, 57-58, 9 |
| Authors | A.P. Mozer |
| Full Paper | 
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