Paper Title:

Silicon Wafer Technology: The Challenges towards the Gigabit Era

Periodical Solid State Phenomena (Volumes 57 - 58)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VII
Edited by C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages 9-18
DOI 10.4028/www.scientific.net/SSP.57-58.9
Citation A.P. Mozer, 1997, Solid State Phenomena, 57-58, 9
Authors A.P. Mozer
Price US$ 28,-
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