Paper Title:
Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
91-96
DOI
10.4028/www.scientific.net/SSP.57-58.91
Citation
R. Job, W. R. Fahrner, A. G. Ulyashin, Y.A. Bumay, A.I. Ivanov, L. Palmetshofer, "Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon", Solid State Phenomena, Vols. 57-58, pp. 91-96, 1997
Online since
July 1997
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Price
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