Paper Title:
Use of Gettering and Defect Induced Processes in Ultra-Thin Buried Oxide Synthesis
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
97-102
DOI
10.4028/www.scientific.net/SSP.57-58.97
Citation
V.G. Litovchenko, A.A. Efremov, B.N. Romanyuk, V.P. Melnik, C. Claeys, "Use of Gettering and Defect Induced Processes in Ultra-Thin Buried Oxide Synthesis", Solid State Phenomena, Vols. 57-58, pp. 97-102, 1997
Online since
July 1997
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Price
$32.00
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