Use of Gettering and Defect Induced Processes in Ultra-Thin Buried Oxide Synthesis |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
97-102 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.97 |
| Citation |
V.G. Litovchenko et al., 1997, Solid State Phenomena, 57-58, 97 |
| Authors |
V.G. Litovchenko, A.A. Efremov, B.N. Romanyuk, V.P. Melnik, C. Claeys |
| Full Paper |
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