Defect Engineering in VLSI-Technologies |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 1-12 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.1 |
| Authors | H. Reimer, W. Nitzsche, Manfred Reiche |
| Full Paper | 
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