Paper Title:
Volume Defect Formation in CZ SI Wafers and Related Electrical Effects
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
103-110
DOI
10.4028/www.scientific.net/SSP.6-7.103
Citation
F.G. Kirscht, P. Fricke, J. Reichel, I. Babanskaya, R. Bertoldi, G. Buchheim, C. Hansch, P. Hübler, H.-J. Machold, R. Scharfe, "Volume Defect Formation in CZ SI Wafers and Related Electrical Effects", Solid State Phenomena, Vols. 6-7, pp. 103-110, 1989
Online since
January 1989
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.