Volume Defect Formation in CZ SI Wafers and Related Electrical Effects |
| Journal |
Solid State Phenomena (Volumes 6 - 7) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology |
| Edited by |
M. Kittler |
| Pages |
103-110 |
| DOI |
10.4028/www.scientific.net/SSP.6-7.103 |
| Citation |
F.G. Kirscht et al., 1989, Solid State Phenomena, 6-7, 103 |
| Authors |
F.G. Kirscht, P. Fricke, J. Reichel, I. Babanskaya, R. Bertoldi, G. Buchheim, C. Hansch, P. Hübler, H.-J. Machold, R. Scharfe |
| Full Paper |
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