Buried Layer Processing for Advanced Bipolar Technology |
|
| Journal | Solid State Phenomena (Volumes 6 - 7) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 111-118 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.111 |
| Citation | Eddy Simoen et al., 1989, Solid State Phenomena, 6-7, 111 |
| Authors | Eddy Simoen, L. Deferm, Jan Vanhellemont, C. Claeys |
| Full Paper | 
Get the full paper by clicking here
|
First page example
