Paper Title:
Oxygen Precipitation in Silicon: Correlation of the Experimental Results Obtained with IR Spectroscopy, Preferential Etching and X-Ray Topography
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
119-126
DOI
10.4028/www.scientific.net/SSP.6-7.119
Citation
E. Hild, J. Seres, E.K. Pal, S. Nouredin, T. Kormàny, "Oxygen Precipitation in Silicon: Correlation of the Experimental Results Obtained with IR Spectroscopy, Preferential Etching and X-Ray Topography", Solid State Phenomena, Vols. 6-7, pp. 119-126, 1989
Online since
January 1989
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Price
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