Paper Title:
On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
129-134
DOI
10.4028/www.scientific.net/SSP.6-7.129
Citation
J. Jablonski, K. Kucharski, J. Wojciechowski, "On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process", Solid State Phenomena, Vols. 6-7, pp. 129-134, 1989
Online since
January 1989
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Price
$32.00
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