Paper Title:
Gettering in Silicon by Oxygen Related Defects, Stacking Faults and Thin Polycrystalline Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
13-20
DOI
10.4028/www.scientific.net/SSP.6-7.13
Citation
R. J. Falster, "Gettering in Silicon by Oxygen Related Defects, Stacking Faults and Thin Polycrystalline Films", Solid State Phenomena, Vols. 6-7, pp. 13-20, 1989
Online since
January 1989
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Price
$32.00
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