Paper Title:
Creation of Deep Denuded Zones in CZ Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
135-142
DOI
10.4028/www.scientific.net/SSP.6-7.135
Citation
G. Kissinger, W. Kissinger, K. Tittelbach, K. Schmalz, "Creation of Deep Denuded Zones in CZ Silicon Wafers", Solid State Phenomena, Vols. 6-7, pp. 135-142, 1989
Online since
January 1989
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Price
$32.00
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