Paper Title:
Effect of Heat Treatment on Defect Formation in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
181-186
DOI
10.4028/www.scientific.net/SSP.6-7.181
Citation
N.A. Sobolev, Y.V. Vyzhigin, V.V. Eliseev, V.A. Kostylev, V.M. Likunova, E.I. Sheck, "Effect of Heat Treatment on Defect Formation in Silicon", Solid State Phenomena, Vols. 6-7, pp. 181-186, 1989
Online since
January 1989
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Price
$32.00
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