Paper Title:
Effects of Rapid Thermal Annealing Treatments on Electrical and Structural Properties of Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
187-196
DOI
10.4028/www.scientific.net/SSP.6-7.187
Citation
E. Susi, "Effects of Rapid Thermal Annealing Treatments on Electrical and Structural Properties of Silicon", Solid State Phenomena, Vols. 6-7, pp. 187-196, 1989
Online since
January 1989
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Price
$32.00
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