Advances in the Understanding of Oxygen and Carbon in Silicon |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 21-32 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.21 |
| Citation | C. Claeys et al., 1989, Solid State Phenomena, 6-7, 21 |
| Authors | C. Claeys, Jan Vanhellemont |
| Full Paper | 
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