Paper Title:
Recrystallization and Defect Formation in Ion-Implanted Silicon Studied by Transmission Electron Microscopy
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
309-314
DOI
10.4028/www.scientific.net/SSP.6-7.309
Citation
H. Bartsch, W. Einbrodt, "Recrystallization and Defect Formation in Ion-Implanted Silicon Studied by Transmission Electron Microscopy", Solid State Phenomena, Vols. 6-7, pp. 309-314, 1989
Online since
January 1989
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Price
$32.00
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