Investigations of the Structure, Formation, and Annihilation of Thermally Induced Donors in Silicon |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 33-40 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.33 |
| Citation | J. Reichel et al., 1989, Solid State Phenomena, 6-7, 33 |
| Authors | J. Reichel, Manfred Reiche, H. Geuther |
| Full Paper | 
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