Paper Title:
Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
335-340
DOI
10.4028/www.scientific.net/SSP.6-7.335
Citation
K. Holldack, H. Kerkow, M. Reiche, "Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon", Solid State Phenomena, Vols. 6-7, pp. 335-340, 1989
Online since
January 1989
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Price
$32.00
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