Paper Title:
The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
341-342
DOI
10.4028/www.scientific.net/SSP.6-7.341
Citation
S. V. Koveshnikov, S.V. Nosenko, E. B. Yakimov, "The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen ", Solid State Phenomena, Vols. 6-7, pp. 341-342, 1989
Online since
January 1989
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Price
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