Paper Title:
Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
395-402
DOI
10.4028/www.scientific.net/SSP.6-7.395
Citation
Z. Laczik, G.R. Booker, R. J. Falster, "Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering ", Solid State Phenomena, Vols. 6-7, pp. 395-402, 1989
Online since
January 1989
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Price
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