Paper Title:
Laser Scanning Tomography: A Study of the Defect Cluster Nucleation and Growth in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
403-408
DOI
10.4028/www.scientific.net/SSP.6-7.403
Citation
J.P. Fillard, P. Gall, M. Castagne, J. Bonnafe, "Laser Scanning Tomography: A Study of the Defect Cluster Nucleation and Growth in Silicon", Solid State Phenomena, Vols. 6-7, pp. 403-408, 1989
Online since
January 1989
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Price
$32.00
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