Paper Title:
The Effect of Low-Energy Electron and Ion Beams on Properties of Near Surface Layers in Semiconductor Crystals
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
409-410
DOI
10.4028/www.scientific.net/SSP.6-7.409
Citation
E. B. Yakimov, "The Effect of Low-Energy Electron and Ion Beams on Properties of Near Surface Layers in Semiconductor Crystals", Solid State Phenomena, Vols. 6-7, pp. 409-410, 1989
Online since
January 1989
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