Paper Title:
Heterogeneous Ion Synthesis of Isolating Layers in Si
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
517-524
DOI
10.4028/www.scientific.net/SSP.6-7.517
Citation
M.Y. Barabanenkov, A.F. Borun, A.B. Danilin, A.A. Malinin, V.N. Mordkovich, "Heterogeneous Ion Synthesis of Isolating Layers in Si", Solid State Phenomena, Vols. 6-7, pp. 517-524, 1989
Online since
January 1989
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Price
$32.00
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