Paper Title:
Spectroscopic Ellipsometry Studies of Silicon on Insulator Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
525-532
DOI
10.4028/www.scientific.net/SSP.6-7.525
Citation
J. Vanhellemont, H.E. Maes, "Spectroscopic Ellipsometry Studies of Silicon on Insulator Structures", Solid State Phenomena, Vols. 6-7, pp. 525-532, 1989
Online since
January 1989
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Price
$32.00
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