Paper Title:
Silicon-on-Insulator Technology by Si-MBE
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
533-538
DOI
10.4028/www.scientific.net/SSP.6-7.533
Citation
M. Maeder, A. Zehe, "Silicon-on-Insulator Technology by Si-MBE", Solid State Phenomena, Vols. 6-7, pp. 533-538, 1989
Online since
January 1989
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Price
$32.00
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