Paper Title:
Defect Engineering in SOI-Structures Formed by High Dose Implantation of Reactive Ions
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
565-570
DOI
10.4028/www.scientific.net/SSP.6-7.565
Citation
W. Skorupa, "Defect Engineering in SOI-Structures Formed by High Dose Implantation of Reactive Ions", Solid State Phenomena, Vols. 6-7, pp. 565-570, 1989
Online since
January 1989
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Price
$32.00
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