Paper Title:
Defect Engineering for Bicmos-Technology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
57-64
DOI
10.4028/www.scientific.net/SSP.6-7.57
Citation
G. Ritter, K.-E. Ehwald, P. Schley, "Defect Engineering for Bicmos-Technology", Solid State Phenomena, Vols. 6-7, pp. 57-64, 1989
Online since
January 1989
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Price
$32.00
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