Defect Engineering for Bicmos-Technology |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 57-64 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.57 |
| Citation | G. Ritter et al., 1989, Solid State Phenomena, 6-7, 57 |
| Authors | G. Ritter, K.-E. Ehwald, P. Schley |
| Full Paper | 
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