Paper Title:
Defect Control in Thick SOI-Films Produced by Zone Melting Recrystallization
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
579-584
DOI
10.4028/www.scientific.net/SSP.6-7.579
Citation
B. Tillack, K. Hoeppner, H.H. Richter, R. Banisch, "Defect Control in Thick SOI-Films Produced by Zone Melting Recrystallization", Solid State Phenomena, Vols. 6-7, pp. 579-584, 1989
Online since
January 1989
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Price
$32.00
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