Defect Formation in Dislocation-Free Silicon Containing Oxygen |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 603-0 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.603 |
| Citation | M.G. Mil'vidskii et al., 1989, Solid State Phenomena, 6-7, 603 |
| Authors | M.G. Mil'vidskii, Vladimir V. Voronkov, V.J. Reznik |
| Full Paper | 
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