Investigation of Gettering Phenomena in Semiconductors by Simultaneous Charge Collection Microscopy and Cathodoluminescence |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 65-72 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.65 |
| Citation | M. Eckstein et al., 1989, Solid State Phenomena, 6-7, 65 |
| Authors | M. Eckstein, A. Jakubowicz, M. Bode, H.U. Habermeier |
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