The Properties of the Defects in Heavy Implanted Silicon |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 79-92 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.79 |
| Citation | V.G. Litovchenko et al., 1989, Solid State Phenomena, 6-7, 79 |
| Authors | V.G. Litovchenko, B.N. Romanyuk |
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