Defect Formation and Lateral Oxidation during Locos Processing |
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| Journal | Solid State Phenomena (Volumes 6 - 7) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology |
| Edited by | M. Kittler |
| Pages | 93-100 |
| DOI | 10.4028/www.scientific.net/SSP.6-7.93 |
| Citation | D. Knoll et al., 1989, Solid State Phenomena, 6-7, 93 |
| Authors | D. Knoll, T. Grabolla, K.-E. Ehwald |
| Full Paper | 
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