Paper Title:
Defect Formation and Lateral Oxidation during Locos Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 6-7)
Edited by
M. Kittler
Pages
93-100
DOI
10.4028/www.scientific.net/SSP.6-7.93
Citation
D. Knoll, T. Grabolla, K.-E. Ehwald, "Defect Formation and Lateral Oxidation during Locos Processing", Solid State Phenomena, Vols. 6-7, pp. 93-100, 1989
Online since
January 1989
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Price
$32.00
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