Gettering and Defect Engineering in Semiconductor Technology
Solid State Phenomena Volumes 6 - 7
doi:10.4028/www.scientific.net/SSP.6-7
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p243
Dependence of Phosphorus Transient Enhanced Diffusion on Depth Position of Extended Defects in Ion Implanted Silicon
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345 K
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Authors: P. Zaumseil, U. Winter, R. Fabbri, Marco Servidori, Sandro Solmi
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p251
Impurity Gettering in Semicrystalline Silicon Solar Cells
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138 K
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Authors: M.A.G. Soler, I. Pereyra, A.M. Andrade
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p257
Formation and Defect Structure of Fe-B-Fe Complexes in Silicon
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350 K
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Authors: W. Gehlhoff, U. Rehse
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p265
Electrical Activity and Impurity Precipitation in Silicon Grain Boundaries
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665 K
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Authors: J.L. Maurice
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p277
Photo-Thermal Ionization Spectroscopy of Point Defects in Semiconductors
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588 K
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Authors: Hermann G. Grimmeiss, Mats Kleverman
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p289
Kink-Point Defect Interaction and Mobility of Dislocations in Semiconductors
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480 K
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Authors: B.Ya. Farber, H.G. Minasyan, V.I. Nikitenko
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p301
I. Conductivity Along Dislocations: Temperature Dependence and Nonlinear Effects II. Combined Resonance and Structure Peculiarities of Plastically Deformed Silicon
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267 K
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Authors: Vitaly V. Kveder, Teimuraz Mchedlidze, Yu.A. Ossipyan, A.I. Shalynin
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p309
Recrystallization and Defect Formation in Ion-Implanted Silicon Studied by Transmission Electron Microscopy
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393 K
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Authors: H. Bartsch, W. Einbrodt
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p315
Auger Recombination in Heavily-Doped p+ Silicon
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316 K
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Authors: S. Voinigescu, A. Müller, Cornel Anton
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p323
Photo-Capacitive Spectroscopy of Sulphur Atoms and Heat Treatment Defects in n-Si
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346 K
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Authors: V.M. Arutyunyan, A.P. Akhoyan, R.S. Barseghyan, B.O. Semerdjian
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p329
EPR Detection of Complex Platinum-Related Defects in Silicon
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192 K
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Authors: M. Höhne
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p335
Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon
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223 K
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Authors: K. Holldack, H. Kerkow, Manfred Reiche
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p341
The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen
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51 K
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Authors: Sergei V. Koveshnikov, S.V. Nosenko, Eugene B. Yakimov
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p343
Dislocation Motion in Compound Semiconductors
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400 K
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Authors: Jürgen Schreiber, H.S. Leipner, H.-R. Höche
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p349
Dislocation Structures after Microdeformation of CaAs Single Crystals
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304 K
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Authors: H.S. Leipner, M. Surowiec