Charge Collection Scanning Microscopy: Non-Conventional Applications |
| Journal |
Solid State Phenomena (Volumes 63 - 64) |
| Volume |
Beam Injection Assessment of Defects in Semiconductors |
| Edited by |
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter |
| Pages |
1-12 |
| DOI |
10.4028/www.scientific.net/SSP.63-64.1 |
| Citation |
Antonio Castaldini et al., 1998, Solid State Phenomena, 63-64, 1 |
| Authors |
Antonio Castaldini, Anna Cavallini |
| Keywords |
Defect Imaging, Electron Beam Induced Current (EBIC), Epilayer, GaAs, Galium Nitride (GaN), Ion Beam Induced Current (IBIC), Optical Beam Induced Current OBIC, Silicon |
| Full Paper |
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