Paper Title:
Impact of Phosphorus Diffusion on the Contamination Level of Dislocations in Deformed Float Zone Silicon as Studied by Beam Injection Techniques
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
105-114
DOI
10.4028/www.scientific.net/SSP.63-64.105
Citation
K. Knobloch, M. Kittler, W. Seifert, J.J. Simon, I. Périchaud, "Impact of Phosphorus Diffusion on the Contamination Level of Dislocations in Deformed Float Zone Silicon as Studied by Beam Injection Techniques", Solid State Phenomena, Vols. 63-64, pp. 105-114, 1998
Online since
December 1998
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