Impact of Phosphorus Diffusion on the Contamination Level of Dislocations in Deformed Float Zone Silicon as Studied by Beam Injection Techniques |
| Journal |
Solid State Phenomena (Volumes 63 - 64) |
| Volume |
Beam Injection Assessment of Defects in Semiconductors |
| Edited by |
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter |
| Pages |
105-114 |
| DOI |
10.4028/www.scientific.net/SSP.63-64.105 |
| Citation |
K. Knobloch et al., 1998, Solid State Phenomena, 63-64, 105 |
| Authors |
K. Knobloch, Martin Kittler, Winfried Seifert, J.J. Simon, Isabelle Périchaud |
| Keywords |
Dislocations, DLTS, EBIC, FZ Silicon, Gettering, LBIC, Phosphorus Diffusion |
| Full Paper |
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