SEM-EBIC Study of Defects in Epitaxial AlGaN Layers |
| Journal |
Solid State Phenomena (Volumes 63 - 64) |
| Volume |
Beam Injection Assessment of Defects in Semiconductors |
| Edited by |
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter |
| Pages |
131-138 |
| DOI |
10.4028/www.scientific.net/SSP.63-64.131 |
| Citation |
G.N. Panin et al., 1998, Solid State Phenomena, 63-64, 131 |
| Authors |
G.N. Panin, O.V. Kononenko, V.N. Matveev, Eugene B. Yakimov, Oliver Ambacher |
| Keywords |
AlGaN, Diffusion Length, Dislocations, EBIC, Galium Nitride (GaN), Minority Carriers |
| Full Paper |
Get the full paper by clicking here
|
