Paper Title:
Cathodoluminescence Microscopy of Semiconductor Devices Using a Novel Detector with High Collection and Backscattered Electron Rejection Efficiency
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
159-170
DOI
10.4028/www.scientific.net/SSP.63-64.159
Citation
J. C.H. Phang, D. S.H. Chan, W.K. Chim, Y. Y. Liu, X. Liu, "Cathodoluminescence Microscopy of Semiconductor Devices Using a Novel Detector with High Collection and Backscattered Electron Rejection Efficiency", Solid State Phenomena, Vols. 63-64, pp. 159-170, 1998
Online since
December 1998
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Price
$32.00
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