Paper Title:
Application of Surface Electron Beam Induced Voltage Method for the Contactless Characterization of Semiconductor Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
327-332
DOI
10.4028/www.scientific.net/SSP.63-64.327
Citation
E.I. Rau, A.N. Zhukov, E. B. Yakimov, "Application of Surface Electron Beam Induced Voltage Method for the Contactless Characterization of Semiconductor Structures", Solid State Phenomena, Vols. 63-64, pp. 327-332, 1998
Online since
December 1998
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Price
$32.00
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