Paper Title:
Failure Mode Analysis of a 0.25 μm CMOS Technology by Scanning Electron and Ion Beams
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
433-442
DOI
10.4028/www.scientific.net/SSP.63-64.433
Citation
D. Krüger, R. Rosenkranz, B. Tippelt, M. Kuhnert, K. Grießbach, A. Lamprecht, S. Hennecke, "Failure Mode Analysis of a 0.25 μm CMOS Technology by Scanning Electron and Ion Beams", Solid State Phenomena, Vols. 63-64, pp. 433-442, 1998
Online since
December 1998
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Price
$32.00
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