Paper Title:
Application of Small Pulsed Ion Beams for Depth Profiling on Beveled Semiconductor Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
465-472
DOI
10.4028/www.scientific.net/SSP.63-64.465
Citation
D. Krüger, K. Iltgen, R. Kurps, "Application of Small Pulsed Ion Beams for Depth Profiling on Beveled Semiconductor Structures", Solid State Phenomena, Vols. 63-64, pp. 465-472, 1998
Online since
December 1998
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