Paper Title:
EBIC and Cathodoluminescence Study of the Bonded Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
481-488
DOI
10.4028/www.scientific.net/SSP.63-64.481
Citation
K. Ikeda, T. Sekiguchi, S. Ito, M. Suezawa, "EBIC and Cathodoluminescence Study of the Bonded Silicon Wafers", Solid State Phenomena, Vols. 63-64, pp. 481-488, 1998
Online since
December 1998
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Price
$32.00
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