Paper Title:
Stress Measurements in sub-μm Si Structures Using Raman Spectroscopy
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
519-524
DOI
10.4028/www.scientific.net/SSP.63-64.519
Citation
K.F. Dombrowski, I. De Wolf, "Stress Measurements in sub-μm Si Structures Using Raman Spectroscopy", Solid State Phenomena, Vols. 63-64, pp. 519-524, 1998
Online since
December 1998
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Price
$32.00
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